Self-Assembled Microactuated XYZ stages for Optical Scanning and Alignment

A novel self-assembled, surface-micromachined micro-XYZ stage with large displacements and fine positioning accuracy has been demonstrated on Si microoptical bench for optical scanning/alignment applications. Continuous lateral scanning up to 120 pm and vertical scanning up to 250 pm have been achieved with integrated scratch drive actuators (SDA), which have step resolutions of 27 nm. The X Y Z stage can be fully assembled by applying electric bias only. Focus adjustment of the micro-Fresnel lens integrated on the micro-XYZ stage has also been successfully demonstrated. They are useful for two-dimensional scanning, dynamic focusinghracking, and fine optical alignment.